2025
Effects of Magnetic Field on Density Distribution and Potential Structure of Capacitively Coupled Plasma
본문
- Author
- 정경재
- Journal
- APPLIED SCIENCE AND CONVERGENCE TECHNOLOGY
- Vol./ Page
- 34(2), 80
- Year
- 2025
- All Authors
- Park, J[Park, Junbeom]; Lee, J[Lee, Jimo]; Go, G[Go, Geunwoo]; Chung, KJ[Chung, Kyoung-Jae]
- P-ISSN
- 1225-8822
- DOI
- 10.5757/ASCT.2025.34.2.80